原子探针断层扫描技术（APT）可以在亚纳米级空间分辨率下定量测量各种元素的三维元素和同位素分布，已越来越多地被应用到地球化学分析领域。文章以两个行星矿物样品和一个硅酸盐玻璃标样作为代表，详细研究了APT方法在定量分析矿物化学成分中的实用性和精确度。与电子探针（EPMA）方法得到的结果相对比表明，两种方法得到的氧化物矿物主量金属元素的含量差距不大，均小于1 at%，但是硅酸盐玻璃中的差距较大。另外，由于APT方法本身的局限性，氧元素的含量存在1~3 at%的偏差。但是，这种偏差也可以通过标准化等方法加以校正。分析结果表明，APT可以作为一种有效的主量元素定量分析方法。APT在分析过程中所给出的元素三维分布信息，可以多角度地研究纳米尺度上的元素迁移过程，为地球化学研究提供新的观测视野。

Atom probe tomography (APT) can quantitatively analyze three-dimensional elemental and isotopic distributions of different elements in a solid sample at sub-nanometer resolution. It has been increasingly used in geochemical analysis. In this work, using two planetary minerals and one silicate glass standard as examples, we study the practicability and accuracy of the APT method in the quantification of chemical composition. Comparison of the results obtained using electron probe microanalysis (EPMA) and APT show that the APT results are close to those from EPMA with the difference of major metal element contents is less than 1 at%, while the difference of silicate glass is much larger. In addition, the difference of oxygen content in all samples is about 1-3 at% due to the limitations of the APT method. However, this oxygen difference can be corrected by normalization using metal elements. Our analyses suggest that APT can be an effective method to quantify major elements in materials. The threedimensional distributions of elements given by APT can be used to the element migration process at nanoscale, which is a new and important technique for geochemical analysis.