Abstract: Transmission electron microscope (TEM) is an important characterization method in nano-geology field which is a branch of modern earth science. TEM offers images with an ultra-high spatial resolution and diversified microanalysis methods. Because of the high complexity and strong heterogeneity of geological samples, the experimental process is complex and difficult when using TEM to analyze and study geological specimens. In this paper, aims to explore a scientific and appropriate testing scheme, the author pays attention to describe every test step. Firstly, according to the characteristics of samples, the appropriate sample preparation methods should be selected and the powder preparation method, ion thinning method and focused ion beam method are introduced. Then, the target minerals are searched, and a search method of SEM+TEM is proposed.Next, different kinds of images are acquired, including bright field image, dark field image, high resolution image, electron diffraction pattern and so on, each theory, process, notices and experimental skills are related and analyzed in detail. Finally, the micro area concerned is selected to test the elements composition and distribution, and commonly used micro area elements composition analysis instruments are compared to illustrate the advantages and the scope of TEM elements analysis.

Key words: TEM, sample preparation, image acquisition, microarea composition analysis