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高校地质学报 ›› 2021, Vol. 27 ›› Issue (3): 356-365.DOI: 10.16108/j.issn1006-7493.2021037

• 固体地球科学领域重点实验室联盟实验技术与应用年会十周年纪念专辑 • 上一篇    下一篇

矿物微区分析中透射电镜测试技术的应用

陈佳妮   

  1. 南京大学 内生金属矿床成矿机制研究国家重点实验室,南京 210023
  • 出版日期:2021-06-20 发布日期:2021-06-21

Application of Transmission Electron Microscopy in Microarea Analysis in Mineral

CHEN Jiani   

  1. State Key Laboratory for Mineral Deposits Research, Nanjing University, Nanjing 210023, China
  • Online:2021-06-20 Published:2021-06-21

摘要: 透射电子显微镜(Transmission Electron Microscope,TEM)提供了超高的空间分辨率和多样化的微区分析方法,是纳米地质学研究的重要表征手段之一。运用TEM技术研究矿物时,由于地质样品的高度复杂性和强烈非均质性,使得实验测试过程复杂而困难。文章探索了一套适用于地质样品的TEM分析测试流程。首先根据样品特性,选择合适的样品制备方法,重点介绍了粉末制备法、离子减薄法及聚焦离子束法;然后进行目标矿物的定位,提出了一种扫描电镜(Scanning Electron Microscope, SEM)+TEM组合定位法;接着进行包括明场像、暗场像、高分辨像、电子衍射花样等不同类型图像的获取,着重说明了各种图像的成像原理、拍摄过程、注意事项和实验技巧;最后是选定关注的微区,测试元素组成及分布情况,并与常用的微区成分分析仪器进行对比,从而说明TEM成分分析的适用范围及优点。

关键词: 透射电子显微镜, 样品制备, 图像的获取, 微区成分分析

Abstract: Transmission electron microscope (TEM) is an important characterization method in nano-geology field which is a branch of modern earth science. TEM offers images with an ultra-high spatial resolution and diversified microanalysis methods. Because of the high complexity and strong heterogeneity of geological samples, the experimental process is complex and difficult when using TEM to analyze and study geological specimens. In this paper, aims to explore a scientific and appropriate testing scheme, the author pays attention to describe every test step. Firstly, according to the characteristics of samples, the appropriate sample preparation methods should be selected and the powder preparation method, ion thinning method and focused ion beam method are introduced. Then, the target minerals are searched, and a search method of SEM+TEM is proposed.Next, different kinds of images are acquired, including bright field image, dark field image, high resolution image, electron diffraction pattern and so on, each theory, process, notices and experimental skills are related and analyzed in detail. Finally, the micro area concerned is selected to test the elements composition and distribution, and commonly used micro area elements composition analysis instruments are compared to illustrate the advantages and the scope of TEM elements analysis.

Key words: TEM, sample preparation, image acquisition, microarea composition analysis

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